Microstructural characterization of BaTiO3 thin films prepared by RF-Magnetron sputtering using sintered targets from high energy ball milled powders The electronic and optical characteristics of ...

Sputtering Technique Sputtering is a process wherein a controlled gas, typically chemically inert argon, is introduced into a vacuum chamber and then a cathode is electrically energized to generate a ...

ULVAC is shipping PZT piezoelectric thin-film sputtering equipment which advances the development of MEMS devices. It used to be impossible to fabricate PZT piezoelectric thin films, which constitute ...